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Corporate Outline
ORIMIRROR®
Orientation mirror
A new crystal orientation identification method using a mirror surface
Maximizes the device area and prevents processing defects caused due to the notch shape
Concept image of ORIMIRROR
What is “ORIMIRROR?”
ORIMIRROR is a new identification method to identify the crystal orientation of semiconductor wafers, and is an alternative to the conventional notch and orientation flat. ORIMIRROR makes it possible to eliminate the notching or cutting process on the wafer outer circumference, and a characteristic flat surface (mirror surface) perpendicular to the crystal plane is created on the wafer edge.
Explanatory image of ORIMIRROR
High precision orientation alignment using an optical sensor
Data for precision of orientation alignment by ORIMIRROR
These values are for reference only under the specified conditions and DISCO does not guarantee these values.
Advantages
Maximizes the device area
Effectively increases the number of possible die obtained from the TAIKO® process and wafer-to-wafer processes that require edge trimming in particular.
Table for comparison between notch and ORIMIRROR in TAIKO process
Prevents processing defects caused due to the notch shape
・ Die flying during the blade dicing process
・ Breakage of ultra-thin wafers during the grinding process
Image of ORIMIRROR advantage on prevention of processing defects
*ORIMIRROR and Orientation mirror are a registered trademark of DISCO Corporation in Japan and other countries.