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DFL7360LFFully Automatic Laser Saw

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laser saw that achieves free-shape processing of thick wafers using the LEAF process

Φ300 mm
Ablation

DFL7360LF is a fully automatic laser saw that supports the LEAF process using laser ablation. It achieves separation of thick workpieces and workpieces with narrow kerfs through processing with a high aspect ratio.
It achieves maskless processing of fine lines and curved shapes, and can process any shape specified by the customer.
It also supports processing of difficult-to-process materials, such as diamond, glass, and sapphire.

Free-shape processing

Achieves laser processing of arbitrary shapes by importing CAD data created by the user. Intuitive operation is also achieved with functions such as a zoom-out feature on the equipment screen.

Thick wafer processing

Supports processing of workpieces up to 1 mm thick as a standard specification, and up to 10 mm thick upon request. (User-specified specification)。

Processing time simulation function

Automatically calculates the processing time in advance and displays it on the screen to help the operator plan subsequent operations.

Specifications

Specification		Unit	DFL7360LF
Processing method		-	LEAF
Max . workpiece size		mm	Φ300
X axis (Chuck table)	Cutting range	mm	210(free-shape processing) 310(linear processing)
X axis (Chuck table)	Cutting speed range	mm/s	1.0 - 1,000
Y axis (Chuck table)	Cutting range	mm	210(free-shape processing) 310(linear processing)
	Index step	mm	0.001
	Positioning accuracy	mm	0.003 or smaller/310 (Single pitch error) 0.002 or smaller/5
Z axis	Movement resolution	mm	0.0000024
Z axis	Repeatability accuracy	mm	0.001
θ axis (Chuck table)	Max. rotation speed	deg	380
Equipment dimensions (W×D×H)		mm	1,100 × 2,245 × 1,800
Equipment weight		kg	Approx. 2,250

* Please read the standard specification sheet before using the equipment.
* Please note that items and specifications may be changed for improvement without prior notice.

Product Lineup



Machine type
Method
Machine dimentions（W × D × H）
Machine weight（kg）


DFL7160	DFL7161	DFL7262
Fully Automatic	Fully Automatic	Fully Automatic
Ablation	Ablation	Ablation
1,200 × 1,550 × 1,800	1,560 × 1,550 × 1,800	1,560 × 1,680 × 1,800
1,750	2,300	2,360