DFL7160Fully Automatic Laser Saw
Supports various applications, including full cut and DAF cut
- Φ300 mm
- Ablation
- DFL7160 is a fully-automatic laser saw for Φ300 mm wafers which uses a pulse laser to achieve non-thermal processing.
- This model has seen wide use in many applications such as GaAs full cut and DAF cut after DBG.
- Wafer contamination from laser processing particles can be prevented through installation of the HogoMax * coating/cleaning mechanism.
*A water-soluble protective film that prevents laser processing particles from adhering to the wafer surface
Adoption of a short pulse laser
Achieves high-quality processing with less processing distortion and deformation due to heating.
Compatibility with various applications
DFL7160 also supports applications for removing TEG on low-k grooves or streets and performing full cut for Si and compound semiconductors.
Kerf check function
Automatically checks and adjusts the laser cut position. This function is installed as a standard specification, making it possible to achieve stable processing.
Specifications
| Specification | Unit | ||
|---|---|---|---|
| Processing method | - | Ablation | |
| Max. workpiece size | mm | Φ300 | |
| X-axis (Chuck table) |
Processing range | mm | 310 |
| Moving speed | mm/s | 0.1 ～ 600 | |
| Y-axis (Chuck table) |
Processing range | mm | 310 |
| Index step | mm | 0.0001 | |
| Positioning accuracy | mm | 0.003/310 (Single error) 0.002/5 |
|
| Z-axis | Moving resolution | mm | 0.00005 |
| Repeatability accuracy | mm | 0.002 | |
| θ-axis (Chuck table) |
Max. rotating angle | deg | 380 |
| Equipment dimensions (W×D×H) | mm | 1,200 × 1,550 × 1,800 | |
| Equipment weight | kg | Approx. 1,750 | |
*Product appearance, features, specifications, and other details may change due to technical
modifications.
*Please read the standard specification sheet thoroughly before use.
Product Lineup
| Machine type |
| Method |
| Machine dimentions（W × D × H） |
| Machine weight（kg） |
 |
| DFL7161 |
| Fully Automatic |
| Ablation |
| 1,560 × 1,550 × 1,800 |
| 2,300 |
DFL7160Fully Automatic Laser Saw
Contact
Please feel free to contact us with any questions or inquiries.