Laser grooving kerf check function

Application processing examples

During blade dicing, when low-k or copper layers are present in the street, which are difficult to cut, usually blade dicing is performed after laser grooving. Adding the kerf check function can optimize this process.

The kerf check can be performed relative to the width or position of the detected groove/kerf. Automatic kerf correction is also possible.

Conventional kerf check function	The grooved area and the kerf are sometimes misrecognized.
Laser grooving kerf check function	The laser groove and kerf are correctly detected and recognized.

The kerf check can be performed relative to the width or position of the detected groove/kerf. Automatic kerf correction is also possible.

Related Information

Low-k grooving
https://www.disco.co.jp/eg/solution/library/laser/low_k.html

This function can be installed as a user-specified specification.
DISCO offers various kerf check methods for various applications. For details, please contact your DISCO sales representative.