With workpieces that take a long time to process such as wafers with large diameters or small die, pad corrosion may occur as the workpiece is in contact with the cutting water for a long period of time. By adding StayClean301 and forming a very thin barrier layer on the workpiece surface, both pad corrosion and the bonding failures that occur as a result of the corrosion can be prevented.
Similar to the bonding pad, the hub blade can also get corroded if it is in contact with the cutting water for a long period of time. Tapering of the blade tip can lead to issues such as narrowing of the kerf width, blade breakage, etc.
By adding StayClean301 and forming a very thin barrier layer on the workpiece surface, blade corrosion can be prevented.
In dicing that uses DI water, particle residue is observed after spinner cleaning, but adding StayClean301 before dicing prevents particle adhesion to the workpiece surface and particle residue after spinner cleaning.
By using the injector developed exclusively for StayClean, stable supply is possible even at concentrations more dilute than one part per thousand.
Specification | Unit | StayClean301 | StayClean Injector |
---|---|---|---|
Solution appearance | - | Transparent liquid with light or no coloring | |
Main ingredient | - | Surfactant + water soluble + water soluble polymer macromolecule | |
pH(undiluted) | pH | 5.5 - 7 | |
Density(25℃) | g/cm3 | 1.00 - 1.05 | |
Residue/decomposition | mg/L | COD 31(JIS K1002-17) | |
(when diluted 3000 times) | mg/L | BOD 12(JIS K0102-21) | |
Recommended dilution | times | 1,500 - 5,000(0.06 - 0.02%) | |
Power supply , voltage | V | AC90-230 Single Phase 50/60 Hz | |
Supply water temperature | deg C | 20 - 25 | |
Supply water pressure | MPa | 0.2 - 0.5 | |
Process flow rate | L/min | 2 - 20 | |
Additive injection rate | % | 0.1 - 0.01(1,000 - 100 ppm) | |
Equipment dimensions(W×D×H) | mm | Injector 200 × 300 × 500 excluding projections Bottle stocker 357 × 392 × 440 excluding projections |
|
Equipment weight | kg | Injector Approximately.22(Dry mass) Bottle stocker Approximately.10(Dry mass) |
Cautions before using StayClean301
Cautions regarding the use of StayClean301
Cautions regarding StayClean301 storage
Please feel free to contact us with any questions or inquiries.