StayClean301Water-soluble Additive
兼顧最佳的防腐蝕性能*和微粒對策的新基準產品
*與本公司產品對比防止焊墊腐蝕
在進行大尺寸晶圓或小晶粒等切割時間較長的作業時、由於切削液長時間接觸加工產品的影響、可能導致焊墊腐蝕的情況發生。透過添加StayClean301、可於加工產品表面形成極薄的保護層、防止焊墊腐蝕以及因焊墊腐蝕導致的接合不良。
防止硬刀的腐蝕以及前端尖細化
刀刃與焊墊相同、硬刀與切削液長時間接觸下亦可能發生腐蝕現象。刀片的前端尖細化會導致切割痕變窄、刀片破損等問題。透過添加StayClean301可於刀刃表面形成極薄的保護層、防止刀片腐蝕。
防止微粒附著
在使用純水切割時、即便Spinner清洗後依然能看見微粒殘渣、但若於切割作業時添加StayClean301、便可防止微粒附著於晶圓表面、進而防止Spinner清洗後的微粒殘渣留存。
原理
- 1.StayClean301中的成分在工作物表面形成保護層、有效地防止接線頭腐蝕及微粒污染。
- 在離心清洗時、同時清除StayClean301成分。
StayClean注入器
透過專為StayClean而開發的StayClean Injector ，即使是1000倍以上的低稀釋濃度，也可實現穩定的供給。
Specifications
| Specification | Unit | StayClean301 | StayClean Injector |
|---|---|---|---|
| Solution appearance | - | Transparent liquid with light or no coloring | |
| Main ingredient | - | Surfactant + water soluble + water soluble polymer macromolecule | |
| pH（undiluted） | pH | 5.5 - 7 | |
| Density（25℃） | g/cm3 | 1.00 - 1.05 | |
| Residue/decomposition | mg/L | COD 31(JIS K1002-17) | |
| (when diluted 3000 times) | mg/L | BOD 12(JIS K0102-21) | |
| Recommended dilution | times | 1,500 - 5,000(0.06 - 0.02%) | |
| Power supply , voltage | V | AC90-230 Single Phase 50/60 Hz | |
| Supply water temperature | deg C | 20 - 25 | |
| Supply water pressure | MPa | 0.2 - 0.5 | |
| Process flow rate | L/min | 2 - 20 | |
| Additive injection rate | % | 0.1 - 0.01(1,000 - 100 ppm) | |
| Equipment dimensions(W×D×H) | mm | Injector 200 × 300 × 500 excluding projections Bottle stocker 357 × 392 × 440 excluding projections |
|
| Equipment weight | kg | Injector Approximately.22(Dry mass) Bottle stocker Approximately.10(Dry mass) |
Cautions before using StayClean301
- Make sure to read the SDS before using StayClean301 because it describes detailed care regarding its use.
- Do not use StayClean301 for any unintended use.
Cautions regarding the use of StayClean301
- Take care that it does not touch your eyes or skin, wear appropriate protective equipment such as gloves and glasses when handling it.
- Avoid using it in conjunction with other chemical agents (in particular strong acids or strong alkalines).
Cautions regarding StayClean301 storage
- Avoid exposure to direct sunlight and store in a cool dark place. However, do not store in a freezer.
- Seal the container properly before storing it.
- With the container still sealed, the warranty period is one year from the date of manufacture.