Particle adhesion is a frequently encountered issue in workpieces with higher water repellency than silicon wafers, such as image sensors with a resin film attached. StayClean-A prevents the workpiece from drying out, and substantially lowers the adhesion of particles by impairing their settling speed.
StayClean-A does not include any regulated chemicals, such as substances covered under the RoHS directive or PFOS. Furthermore, StayClean-A can be used in the same environment※ as normal dicing.
※If your cutting water is being circulated, please contact your DISCO sales representative.
StayClean-A lowers the settling speed of the contamination and prevents adhesion by creating rising air bubbles in the cutting water.
*Nozzle + side flow nozzle + chuck table water curtain
By using the injector developed exclusively for StayClean, stable supply is possible even at concentrations more dilute than one part per thousand.
Specification | Unit | StayClean-A | StayClean Injector |
---|---|---|---|
Solution appearance | - | Transparent colorless and light yellow liquid | |
Main ingredient | - | Nonionic surfactant + water soluble polymer macromolecule | |
pH(undiluted) | pH | 7.5 - 9.5 | |
Density(15℃) | g/cm3 | 1.0 - 1.02 | |
Residue/decomposition | mg/L | COD 56(JIS K0102-17) | |
(when diluted 1000 times) | mg/L | BOD 62(JIS K0102-21) | |
Recommended dilution | times | 1,000 - 2,000(0.1 - 0.05%) | |
Power supply , voltage | V | AC90-230 Single Phase 50/60 Hz | |
Supply water temperature | deg C | 20 - 25 | |
Supply water pressure | MPa | 0.2 - 0.5 | |
Process flow rate | L/min | 2 - 20 | |
Additive injection rate | % | 0.1 - 0.01(1,000 - 100 ppm) | |
Equipment dimensions(W×D×H) | mm | Injector 200 × 300 × 500 excluding projections Bottle stocker 357 × 392 × 440 excluding projections |
|
Equipment weight | kg | Injector Approximately.22(Dry mass) Bottle stocker Approximately.10(Dry mass) |
Cautions before using StayClean-A
Cautions regarding the use of StayClean-A
Cautions regarding StayClean-A storage
Please feel free to contact us with any questions or inquiries.