Tape frames hold the wafer or other workpiece during dicing.
Frame Size | Wafer Diameter | Type | Part Numbers. | Frame size (mm) | Material | Remarks | ||
---|---|---|---|---|---|---|---|---|
Outside Diameter | Min. Outer Diameter | Inside Diameter | ||||||
Φ5 inch | Φ4 inch | DTF2-5-1 | MEDFNB29 | 168.2 | - | 146 | Resin | Square |
Φ5 inch | DTF2-5 | MDTFR125-01 | 195 | 190 | 165 | Stainless steel | Round | |
Φ6 inch | DTF2-6 | MDTFR125-02 | 214 | 195 | 175 | Stainless steel | Standard type | |
Φ6 inch | DTF2-6-1 | MDTFR150-03 | 228 | 212 | 194 | Stainless steel | Standard type | |
Φ8 inch | Φ8 inch | DTF2-8-1 | MDTFR200-04 | 296 | 276 | 250 | Stainless steel | Standard type |
215x132 | DTFS215-01 | MDTFS215-01 | 296 | 276 | - | Stainless steel | For square chuck table | |
Φ12 inch | Φ12 inch | DTF2-12 | MDTFR300-05 | 400 | 380 | 350 | Stainless steel | 1.5 mm thick |
DTF2-12-1 | MDTFR300-06 | 400 | 380 | 350 | Stainless steel | 1.2 mm thick | ||
250x250 | DTFS250-02 | MDTFS250-02 | 400 | 380 | - | Stainless steel | 1.5 mm thick |
※For details of part numbers, please contact yourDISCO
service representative.
※Orders in single units is possible.