图像传感器等带树脂膜的晶圆与传统的Si晶圆相比具有较高防水性、此类加工物会因干燥而产生微粒黏着的问题。StayClean-A在抑制加工物的干燥的同时,降低了微粒的沉淀速度,从而大幅减少了微粒的附着。
StayClean-A中不含任何RoHS指定对象物质以及PFOS等受管制化学物质,可在通常切割相同的环境※中使用。
※循环使用时请另行洽谈。
StayClean-A通过在切削水中产生上升气泡来降低微粒的沉淀速度,从而减少了微粒在工作物上的附着。
※V喷嘴+侧流喷嘴+ C/T水幕
通过专为StayClean而开发的StayClean注入器,即使是1000倍以上的低稀释浓度,也可实现稳定的供给。
Specification | Unit | StayClean-A | StayClean Injector |
---|---|---|---|
Solution appearance | - | Transparent colorless and light yellow liquid | |
Main ingredient | - | Nonionic surfactant + water soluble polymer macromolecule | |
pH(undiluted) | pH | 7.5 - 9.5 | |
Density(15℃) | g/cm3 | 1.0 - 1.02 | |
Residue/decomposition | mg/L | COD 56(JIS K0102-17) | |
(when diluted 1000 times) | mg/L | BOD 62(JIS K0102-21) | |
Recommended dilution | times | 1,000 - 2,000(0.1 - 0.05%) | |
Power supply , voltage | V | AC90-230 Single Phase 50/60 Hz | |
Supply water temperature | deg C | 20 - 25 | |
Supply water pressure | MPa | 0.2 - 0.5 | |
Process flow rate | L/min | 2 - 20 | |
Additive injection rate | % | 0.1 - 0.01(1,000 - 100 ppm) | |
Equipment dimensions(W×D×H) | mm | Injector 200 × 300 × 500 excluding projections Bottle stocker 357 × 392 × 440 excluding projections |
|
Equipment weight | kg | Injector Approximately.22(Dry mass) Bottle stocker Approximately.10(Dry mass) |
注意事项【使用前】
注意事项【使用時】
注意事项【保管時】