When grinding PZT (piezoelectric zirconate titanate), which is commonly used as piezoelectric material, surface roughness varies among die on the surface. This variation can be reduced by applying “In-feed and Creep feed Grinding”.

Reducing the surface roughness variation in PZT grinding leads to the stability in the following features.

• Converting pressure to electricity
• Converting electricity to vibration and displacement
• Converting electricity to vibration and then reconverting to electricity

Compared with in-feed grinding, creep-feed grinding is more effective as a measure to prevent surface roughness variation.
It is possible to reduce the surface roughness to about one fifth.
For details, refer to the below drawing.

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