DAD3221Automatic Dicing Saw

Evolved Compact Dicing Saw

Φ150 mm
Single spindle

Compatible with Diverse Small Workpiece Processing Needs

DAD3221 is a single-axis dicing saw which achieves processing of workpieces up to Φ6 inches as a standard, and 150 x 150 mm with a user-specified specification. Has the world’s smallest footprint^* (width: 490 mm x depth: 870 mm) through the small footprint design. A 2.0 kW high-torque spindle is installed as a standard specification and a high-rotation 1.8 kW spindle is available as an option.

*Investigated by DISCO

High Productivity

Software operation speed and response speed are improved through adoption of a high performance MCU. The axis speed is accelerated and throughput is improved by adopting servo motors for all axes. In addition, this model uses PC electric components as standard and supports communication control as an option. Because image recognition functions, such as auto alignment, auto focus, auto kerf check, are installed as a standard specification, it is possible to minimize operator labor costs.

Improved functions and operation

The high-speed, high-accuracy NCS (Non-Contact Setup, optional) reduces blade height measurement time for the processing table by 74%. Further processing quality stabilization is achieved through improved measurement accuracy. In addition, the visibility during kerf check was improved by enabling microscope ring light three-channel switching. This model supports SECS/GEM.

Ring light three-channel switching specification

Ease of operation

XIS (Extended Interface System)
Operation buttons are consolidated on the microscope screen.
Wafer mapping
The processing status is displayed visually in the same way as fully automatic equipment.
Log viewer
Analog data is displayed in a graph and equipment data is more easily visualized.
Help viewer
Troubleshooting is displayed when an error occurs to achieve quick and accurate recovery support.
Automatic alignment, Autofocus, Automatic kerf check

Specifications

Specification		Unit	2.0 kW	1.8 kW (option)
Max. workpiece size		-	Φ6 inch (150 mm × 150mm user-specified specification)
X-axis	Cutting range	mm	160
X-axis	Cutting speed	mm/s	0.1～800
Y-axis	Cutting range	mm	162
	Index step	mm	0.0001
	Index positioning accuracy	mm	0.005/160 (Single error) 0.003/5
	Index positioning accuracy	mm	Y-axis scale (option) 0.002/160 (Single error) 0.001/5
Z-axis	Max. stroke	mm	32.2（Φ2 inch blades）
	Moving resolution	mm	0.000002
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	320
Spindle	Layout	-	Single
	Rated output	kW	2.0 at 40,000 min^-1	1.8 at 60,000 min^-1
	Rated torque	N・m	0.48	0.29
	Rotation speed range	min^-1	3,000 ～ 40,000	6,000 ～ 60,000
Equipment dimensions（W × D × H）		mm	490 × 870 × 1,670
Equipment weight		kg	Approx. 420

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DAD324	DAD3231	DAD3241	DAD3350	DAD3351	DAD3361	DAD3431	DAD3651	DAD3660	DAD3661
Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic
1	1	1	1	1	1	1	2	2	2
1	1	1	1	1	1	1	1	1	1
490 × 870 × 1,670	650 × 950 × 1,670	650 × 950 × 1,670	900 × 1,050 × 1,800	880 × 1000 × 1,800	880 × 1,000 × 1,800	730 × 900 × 1,670	790 × 790 × 1,800	1,350 × 1,200 × 1,890	1,350 × 1,200 × 1,800
420	550	550	1,200	1,100	1,100	600	1,040	1,500	1,550