DAD3351Automatic Dicing Saw

Highly expandability to support various processing needs

Φ200 mm
Single spindle

Supports a wide range of applications

DAD3351 is a semi automatic dicing saw compatible with Φ8-inch workpieces. Includes a high output 1.8 kW spindle as standard. Also, using a high torque, high rigidity 2.2 kW spindle (optional), difficult-to-process materials including silicon and ceramics can be processed. Through a user-specified specification, blades up to Φ5 inches can be used for processing. As a result, it is possible to process workpieces with thicknesses of 10 mm or more. Supports blades up to Φ5 inches with user-specified specification. In addition, the multi-alignment function is available as an option.

Stable processing quality

Adopted high bridge-type frame structure and moved the spindle support structure forward to minimize the effects of thermal expansion and vibration, providing a more stable processing point. In addition, a spindle temperature sensor was installed for temperature monitoring.

Processing Time Reduction

Processing time is decreased up to 5% compared to the existing equipment through axis-speed improvement by adopting servo motors for all axes and optimizing the control parameters.

Improved functions and operation

The high-speed, high-accuracy NCS (Non-Contact Setup, optional) reduces blade height measurement time for the processing table by 74%. Further processing quality stabilization is achieved through improved measurement accuracy. In addition, the visibility during kerf check was improved by enabling microscope ring light three-channel switching. This model supports SECS/GEM.

Ring light three-channel switching specification

Easy operation

XIS (Extended Interface System)
Operation buttons consolidated on microscope screens
Wafer mapping
Graphic processing condition display similar to full automation equipment
Log viewer
Graphic analog data display and equipment data visualization
Help viewer
Displays instructions when error occurs for quick, accurate recovery.

High maintainability

Enhancement of Dust Prevention Performance on X-, Y-, and Z-axes.
Effective for materials including ceramics where contamination is likely to damage the shaft.

Specifications

Specification		Unit	1.8 kW	2.2 kW (Option)	2.2 kW (Option) (High torque)
Max. workpiece size		-	Φ8 inch (250 mm × 250 mm user-specified specification)
X axis	Cutting range	mm	260
X axis	Cutting speed	mm/s	0.1 ～ 1,000
Y-axis	Cutting range	mm	260
	Index step	mm	0.0001
	Index positioning accuracy	mm	0.002/260 (Single error) 0.002/5
Z-axis	Max. stroke	mm	31.2	31.4
	Moving resolution	mm	0.0000002 (0.2 nm)
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	320 Θ axis rotation specification 380°(option):382.5
Spindle	Rated output		1.8 at 60,000 min^-1	2.2 at 30,000 min^-1	2.2 at 15,000 min^-1
	Rated torque	N・m	0.29	0.7	1.4
	Rotation speed range	min^‐1	6,000 ～ 60,000	3,000 ～ 30,000	3,000 ～ 15,000
Equipment dimensions(W×D×H)		mm	880 × 1,000 × 1,800
Equipment weight		kg	Approx. 1,100

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DAD324	DAD3221	DAD3231	DAD3241	DAD3350	DAD3361	DAD3431	DAD3651	DAD3660	DAD3661
Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic
1	1	1	1	1	1	1	2	2	2
1	1	1	1	1	1	1	1	1	1
490 × 870 × 1,670	490 × 870 × 1,670	650 × 950 × 1,670	650 × 950 × 1,670	900 × 1,050 × 1,800	880 × 1,000 × 1,800	730 × 900 × 1,670	790 × 790 × 1,800	1,350 × 1,200 × 1,890	1,350 × 1,200 × 1,800
420	420	550	550	1,200	1,100	600	1,040	1,500	1,550