DAD3361Automatic Dicing Saw

Highly expandability to support various processing needs

Φ300 mm
Single spindle

Supports a wide range of applications

DAD3361 is a semi-automatic dicing saw capable of handling Φ300 mm workpieces.^* A high-output 1.8 kW spindle is equipped as standard. By selecting a 2.2 kW high-torque, high-rigidity spindle (optional), it is possible to process silicon up to difficult-to-process materials, such as ceramic. Support for blades of up to Φ5 inches is possible with user-specified specifications. In addition, the alignment function for multiple-mounting workpieces to one table frame can be added an option.

* Supports jig tables with Φ395 mm or smaller circumscribed circles (user-specified specification).

Stable processing quality

By adopting a high-rigidity bridge-type frame and a spindle front-section support structure, which prevents heat shrinkage and vibration, a more stable processing point can be achieved. In addition, a temperature monitoring function that utilizes a spindle temperature sensor has been installed.

Processing Time Reduction

Processing time is decreased up to 2% compared to the existing equipment through axis-speed improvement by adopting servo motors for all axes and optimizing the control parameters.

Improved functions and operation

The high-speed, high-accuracy NCS (Non-Contact Setup, optional) reduces blade height measurement time for the processing table by 74%. Further processing quality stabilization is achieved through improved measurement accuracy. In addition, the visibility during kerf check was improved by enabling microscope ring light three-channel switching. This model supports SECS/GEM.

Ring light three-channel switching specification

Easy operation

XIS (Extended Interface System)
Operation buttons consolidated on microscope screens
Wafer mapping
Graphic processing condition display similar to full automation equipment.
Log viewer
Graphic analog data display and equipment data visualization
Help viewer
Displays instructions when error occurs for quick, accurate recovery.

High maintainability

Enhancement of Dust Prevention Performance on X-, Y-, and Z-axes.
Effective for materials including ceramics where contamination is likely to damage the shaft.

Multi-mounted workpiece processing

Allows multiple package substrates to be attached to one tape frame for processing (Maximum: 16 workpieces).

Measurement alignment

Enables highly accurate processing by performing multiple point alignments for materials with irregular expansion and contraction including resin substrates.

Specifications

Specification		Unit	1.8 kW	2.2 kW (Optional *)	2.2 kW High torque (optional)
Max. workpiece size		-	Φ300 mm (280 mm × 280 mm user-specified specification)
X-axis	Cutting range	mm	310
X-axis	Cutting speed	mm/s	0.1 ～ 1,000
Y-axis	Cutting range	mm	310
	Index step	mm	0.0001
	Index positioning accuracy	mm	0.002/310 (Single error) 0.002/5
Z-axis	Max. stroke	mm	31.2	31.4
	Moving resolution	mm	0.0000002 (0.2 nm)
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	320 Θ-axis rotation specification (optional)
Spindle	Rated output	kW	1.8 at 60,000 min^-1	2.2 at 30,000 min^-1	2.2 at 15,000 min^-1
	Rated torque	N・m	0.29	0.7	1.4
	Rotation speed range	min^‐1	6,000 ～ 60,000	3,000 ～ 30,000	3,000 ～ 15,000
Equipment dimensions(W×D×H)		mm	880 × 1,000 × 1,800
Equipment weight		kg	Approx. 1,100

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DAD324	DAD3221	DAD3231	DAD3241	DAD3350	DAD3351	DAD3431	DAD3651	DAD3660	DAD3661
Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic
1	1	1	1	1	1	1	2	2	2
1	1	1	1	1	1	1	1	1	1
490 × 870 × 1,670	490 × 870 × 1,670	650 × 950 × 1,670	650 × 950 × 1,670	900 × 1,050 × 1,800	880 × 1000 × 1,800	730 × 900 × 1,670	790 × 790 × 1,800	1,350 × 1,200 × 1,890	1,350 × 1,200 × 1,800
420	420	550	550	1,200	1,100	600	1,040	1,500	1,550