The DFD6340 features a facing dual-spindle configuration with a shorter distance between blades, which improves throughput by up to 30 % for step/bevel cut and 40 % for dual cut when compared with parallel dual spindle dicing saws.
By employing a new high-rigidity, bridge-type frame structure, the DFD6340 has the smallest footprint of any 8" saw in its class.
Utilizing the latest in conservation technology, the energy and air consumption of the DFD6340 has been reduced by 33 % and 24 % respectively when compared to the previous generation of saws.
The DFD6340 offers consistent cut quality with the adoption of a Synchro Spindle™ featuring superior radial rigidity. An atomizing nozzle cleaning mechanism can also be included in the spinner unit as an option to effectively clean wafers after dicing (Patent no. 3410385).
Two Non-Contact Setup sensors, one each for Z1 & Z2, enables increased throughput.
* optional function
A dedicated high-magnification microscope for each spindle allows for simultaneous kerf checking for increased throughput.
* optional function
Cutting water flow rate can be set in the device data. In addition, water flow rate is monitored during processing, making it possible to ensure a constant and stable flow rate.
The DFD6340 utilizes an adjustable LCD touch screen graphical user interface making operation and maintenance intuitive and easy. The inclusion of an inspection stage allows for the removal and checking of wafers after dicing during fully automatic operation.
|Specification||Unit||1.2, 1.8 kW||2.2 kW|
|Max. workpiece size||-||Φ8 inch|
|Cutting speed||mm/s||0.1 ～ 600|
|Positioning accuracy||mm||Within 0.002/210
(Single error) Within 0.002/5
|Z-axis||Max. stroke||mm||19.22 (For Φ2 inch blade)||19.9 (For Φ3 inch blade)|
|θ-axis||Max. rotating angle||deg||380|
|Spindle||Rated torque||N・m||0.19（1.2 kW）
|Revolution speed range||min‐1||6,000 ～ 60,000||3,000 ～ 30,000|
|Machine dimensions(W×D×H)||mm||1,180 × 1,110 × 1,850|
|Machine weight||kg||Approx. 1,600|
*Product appearance, features, specifications, and other details may change due to technical
*Please read the standard specification sheet thoroughly before use.
|Machine dimentions（W × D × H）|
|Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic|
|900 × 1,190 × 1,800||1,180 × 1,080 × 1,820||1,200 × 1,550 × 1,800||1,200 × 1,550 × 1,800||1,200 × 1,550 × 1,800||1,120 × 1,500 × 1,600||1,240 × 1,550 × 1,960||1,240 × 1,550 × 1,960||1,510 × 1,554 × 1,800||1,200 × 1,900 × 1,800|