DFD6340Fully Automatic Dicing Saw

Standard dual spindle dicing saw

Φ200 mm
Facing dual spindle
DBG
Package Singulation

Maximized throughput

The DFD6340 features a facing dual-spindle configuration with a shorter distance between blades, which improves throughput by up to 30 % for step/bevel cut and 40 % for dual cut when compared with parallel dual spindle dicing saws.

Small footprint

By employing a new high-rigidity, bridge-type frame structure, the DFD6340 has the smallest footprint of any 8" saw in its class.

Lower air and energy consumption

Utilizing the latest in conservation technology, the energy and air consumption of the DFD6340 has been reduced by 33 % and 24 % respectively when compared to the previous generation of saws.

Consistent cut quality

The DFD6340 offers consistent cut quality with the adoption of a Synchro Spindle™ featuring superior radial rigidity. An atomizing nozzle cleaning mechanism can also be included in the spinner unit as an option to effectively clean wafers after dicing.

Shorter set up time - two NCS^* sensors

Two Non-Contact Setup sensors, one each for Z1 & Z2, enables increased throughput.

* optional function

Shorter kerf check time - two microscopes^*

A dedicated high-magnification microscope for each spindle allows for simultaneous kerf checking for increased throughput.

* optional function

Process stability - cutting water flow control

Cutting water flow rate can be set in the device data. In addition, water flow rate is monitored during processing, making it possible to ensure a constant and stable flow rate.

Easy operation

The DFD6340 utilizes an adjustable LCD touch screen graphical user interface making operation and maintenance intuitive and easy. The inclusion of an inspection stage allows for the removal and checking of wafers after dicing during fully automatic operation.

DFD6340 Operation flow

Lower arm moves the workpiece from the cassette to the pre-alignment stage. Lower arm moves the workpiece to the chuck table → cutting →
Upper arm moves the workpiece to the spinner table → cleaning & drying →
Lower arm returns the workpiece to the cassette

Specifications

Specification		Unit	1.2, 1.8 kW	2.2 kW
Max. workpiece size		-	Φ8 inch
X-axis	Cutting range	mm	210
X-axis	Cutting speed	mm/s	0.1 ～ 600
Y1･Y2-axis	Cutting range	mm	210
	Index step	mm	0.0001
	Positioning accuracy	mm	Within 0.002/210 (Single error) Within 0.002/5
Z-axis	Max. stroke	mm	19.22 (For Φ2 inch blade)	19.9 (For Φ3 inch blade)
	Moving resolution	mm	0.00005
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	380
Spindle	Rated torque	N・m	0.19（1.2 kW） 0.29（1.8 kW）	0.7
Spindle	Rotation speed range	min^‐1	6,000 ～ 60,000	3,000 ～ 30,000
Equipment dimensions(W×D×H)		mm	1,180 × 1,110 × 1,850
Equipment weight		kg	Approx. 1,600

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DFD6240	DFD6341	DFD6342	DFD6361	DFD6362	DFD6363	DFD6450	DFD6560	DFD6561	DFD6750	DFD6760
Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic
1	2	2	2	2	2	2	2	2	2	2
1	1	1	1	1	1	1	1	1	2	2
900 × 1,190 × 1,800	1,180 × 1,080 × 1,820	1,180 × 1,080 × 1,820	1,200 × 1,550 × 1,800	1,200 × 1,550 × 1,800	1,200 × 1,550 × 1,800	1,120 × 1,500 × 1,600	1,240 × 1,550 × 1,960	1,240 × 1,550 × 1,800	1,510 × 1,554 × 1,800	1,200 × 1,900 × 1,800
1,200	1,500	1,240	2,050	2,050	1,800	1,400	1,640	1,500	2,200	2,800