DFD6240Fully Automatic Dicing Saw

Among the World’s Smallest Single Spindle Dicing Saws

Φ200 mm
Single spindle

Factory-friendly design

By optimizing the frame structure and handling section layout, the footprint is on par with that of DISCO’s semi-automatic unit (DAD3350), even though it is equipped with all the functions of a fully automatic unit (size reduced by about 20% from the DFD641). The equipment is designed to reduce energy and air consumption, contributing to lower operation costs and environmental impact. In addition, the condition monitor relays the processing status and key equipment information in real time for use in periodic inspections and process management.

Improved cut quality

DFD6240 offers highly consistent and dependable cut quality through the new Synchro Spindle™ for superior radial rigidity. The cutting water flow rate controller, programmable via the touch-panel display, sets the flow rate for each process recipe. Atomizing nozzle technology is available for the wheel cover, where it effectively reduces particle adhesion, and the spinner cleaning unit, where it yields exceptionally clean wafers after dicing.

Improved usability

Spindle shaft-lock feature and auto-open/close wheel cover (accessible from the equipment front) make blade replacement quick and easy. In addition, operation is simplified through adoption of the LCD touch panel and GUI (Graphical User Interface).

Higher throughput

Increased speed ranges and return speeds for the equipment axes contributes to improved dicing throughput.

Spindle Lineup

A 1.2 kW high-rigidity spindle is installed as a standard specification. In addition, the adoption of center thrust design makes it possible to support workpieces with high processing loads, including glass, ceramics, and other materials, using the 1.8 kW (option, compatible with 2” blades) or 2.2 kW spindle (option, compatible with 3” blades) with improved rigidity.

DFD6240 Operation flow

Lower arm moves the workpiece from cassette to the pre-alignment stage. Lower arm moves the workpiece to the chuck table → dicing →
Upper arm moves the workpiece to the spinner table → cleaning and drying →
Lower arm returns the workpiece to cassette

Specifications

Specification		Unit	1.2, 1.8 kW	2.2 kW
Max. workpiece size		-	Φ8 inch
X-axis	Cutting range	mm	210
X-axis	Cutting speed	mm/s	0.1 ～ 600
Y-axis	Cutting range	mm	210
	Index step	mm	0.0001
	Positioning accuracy	mm	Within 0.003/210 (Single error) Within 0.002/5
Z-axis	Max. stroke	mm	19.22 (For Φ2 inch blade)	19.9 (For Φ3 inch blade)
	Moving resolution	mm	0.00005
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	380
Spindle	Rated torque	N・m	0.19（1.2 kW） 0.29（1.8 kW）	0.7
Spindle	Rotation speed range	min^‐1	6,000 ～ 60,000	3,000 ～ 30,000
Equipment dimensions(W×D×H)		mm	900 × 1,190 × 1,800
Equipment weight		kg	Approx. 1,200

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DFD6340	DFD6341	DFD6342	DFD6361	DFD6362	DFD6363	DFD6450	DFD6560	DFD6561	DFD6750	DFD6760
Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic
2	2	2	2	2	2	2	2	2	2	2
1	1	1	1	1	1	1	1	1	2	2
1,180 × 1,110 × 1,850	1,180 × 1,080 × 1,820	1,180 × 1,080 × 1,820	1,200 × 1,550 × 1,800	1,200 × 1,550 × 1,800	1,200 × 1,550 × 1,800	1,120 × 1,500 × 1,600	1,240 × 1,550 × 1,960	1,240 × 1,550 × 1,800	1,510 × 1,554 × 1,800	1,200 × 1,900 × 1,800
1,600	1,500	1,240	2,050	2,050	1,800	1,400	1,640	1,500	2,200	2,800