DAD324Automatic Dicing Saw

Φ6-inch Compact Dicing Saw which Achieves World’s Smallest Footprint while Improving Functionality

Φ150 mm
Single spindle

Support for a variety of applications from semiconductor wafers to electronic parts

DAD324 is a single-axis dicing saw which is compatible with workpieces up to Φ6 inches with a 2.0 kW high-torque spindle. 150 x 150 mm workpieces can be processed using a user-specified specification.

High productivity

Software operation speed and response speed are improved through adoption of a high performance MCU. The axis speed is accelerated and throughput is improved by adopting servo motors for all axes. In addition, this model uses PC electric components as standard and supports communication control as an option. The high-speed NCS (Non-Contact Setup) reduces measurement time.

	Current(DAD322)	DAD324
X-axis	500	800
Y-axis	150	200
Z-axis	30	80

mm/s

World’s smallest footprint^*

Compact design with a width of 490 mm
he reduced profile contributes towards a large increase in terms of productivity per unit area, especially when multiple.

* Investigated internally

Ease of operation

XIS (Extended Interface System)
Operation buttons are consolidated on the microscope screen.
Wafer mapping
The processing status is displayed visually in the same way as fully automatic equipment.
Log viewer
Analog data is displayed in a graph and equipment data is more easily visualized.
Help viewer
Troubleshooting is displayed when an error occurs to achieve quick and accurate recovery support.
Automatic alignment
Autofocus
Automatic kerf check

Specifications

Specification		Unit
Max. workpiece size		-	Φ6 inch/150 × 150 mm (user-specified specification)
X-axis	Cutting range	mm	160
X-axis	Cutting speed	mm/s	0.1 - 800
Y-axis	Cutting range	mm	162
	Index step	mm	0.0001
	Index positioning accuracy	mm	0.005/160 (Single error)0.003/5
Z-axis	Max. stroke	mm	32.2
	Moving resolution	mm	0.000002(2nm)
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	320
Spindle	Rated output	kW	2.0 at 40,000 min^-1
	Rated torque	N・m	0.48
	Rotation speed range	min^‐1	3,000 - 40,000
Equipment dimensions（W × D × H）		mm	490 × 870 × 1,670
Equipment weight		kg	Approx. 420

*This model supports blades with an outer diameter of 55.56 mm and processing for max. 1.2 mm thick workpieces.
*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DAD3221	DAD3231	DAD3241	DAD3350	DAD3351	DAD3361	DAD3431	DAD3651	DAD3660	DAD3661
Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic
1	1	1	1	1	1	1	2	2	2
1	1	1	1	1	1	1	1	1	1
490 × 870 × 1,670	650 × 950 × 1,670	650 × 950 × 1,670	900 × 1,050 × 1,800	880 × 1000 × 1,800	880 × 1,000 × 1,800	730 × 900 × 1,670	790 × 790 × 1,800	1,350 × 1,200 × 1,890	1,350 × 1,200 × 1,800
420	550	550	1,200	1,100	1,100	600	1,040	1,500	1,550