DFD6361Fully Automatic Dicing Saw

Advanced performance for Φ300 mm dicing

Φ300 mm
Facing dual spindle
DBG

Enhanced dicing throughput

The DFD6361 enhances throughput in two distinct ways. DISCO’s facing dual design and a reduction in distance between the blades help to control total cut time, while high-magnification microscopes (standard) and non-contact setup sensors (option) for both Z1 and Z2 reduce the time required for non-dicing sequences, such as kerf check and blade setup.

Consistent cut quality

DFD6361 offers highly consistent and dependable cut quality through the new Synchro Spindle™ featuring superior radial rigidity. An atomizing nozzle cleaning mechanism can also be installed in the spinner unit as an option to effectively clean wafers after dicing.

Improved usability

Auto-open/close wheel cover and spindle shaft-lock feature make blade replacement quick and easy. In addition, the condition monitor relays processing status and key equipment information in real time. DFD6361 also has a cutting water flow rate control feature, making it possible to manage the flow rate on the screen. An adjustable LCD touch screen with GUI (Graphical User Interface) have also been adopted.

Spindle lineup

The 1.2 kW spindle (standard) features superior rigidity. A center thrust design gives the 1.8 kW spindle (option, uses 2 ” blades) and the 2.2 kW spindle (option, uses 3 ” blades) extra rigidity for processing glass, ceramics, and other high processing load materials.

Small footprint

The bridge-type frame structure and improved wafer handling system contribute to the compact size and small footprint of the DFD6361.

DFD6340 Operation flow

Frame pick arm moves the workpiece from the cassette to the pre-alignment stage →
After centering on the pre-alignment stage, the lower arm moves the workpiece to the chuck table → cutting →
Upper arm moves the workpiece to the spinner table → cleaning and drying →
Lower arm moves the workpiece to the pre-alignment stage →
Frame pick arm returns the workpiece to the cassette

Specifications

Specification		Unit	1.2, 1.8 kW	2.2 kW
Max. workpiece size		mm	Φ300
X-axis	Cutting range	mm	310
X-axis	Cutting speed	mm/s	0.1 ～ 600
Y1･Y2-axis	Cutting range	mm	310
	Index step	mm	0.0001
	Positioning accuracy	mm	Within 0.002/310 (Single error) Within 0.002/5
Z-axis	Max. stroke	mm	14.7 (For Φ2 inch blade)	14.9（For Φ3 inch blade）
	Moving resolution	mm	0.00005
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	380
Spindle	Rated torque	N・m	0.19（1.2 kW） 0.29（1.8 kW）	0.7
Spindle	Rotation speed range	min^‐1	6,000 ～ 60,000	3,000 ～ 30,000
Equipment dimensions(W×D×H)		mm	1,200 × 1,550 × 1,800
Equipment weight		kg	Approx. 2,050

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DFD6240	DFD6340	DFD6341	DFD6342	DFD6362	DFD6363	DFD6450	DFD6560	DFD6561	DFD6750	DFD6760
Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic
1	2	2	2	2	2	2	2	2	2	2
1	1	1	1	1	1	1	1	1	2	2
900 × 1,190 × 1,800	1,180 × 1,110 × 1,850	1,180 × 1,080 × 1,820	1,180 × 1,080 × 1,820	1,200 × 1,550 × 1,800	1,200 × 1,550 × 1,800	1,120 × 1,500 × 1,600	1,240 × 1,550 × 1,960	1,240 × 1,550 × 1,800	1,510 × 1,554 × 1,800	1,200 × 1,900 × 1,800
1,200	1,600	1,500	1,240	2,050	1,800	1,400	1,640	1,500	2,200	2,800