DFD6341Fully Automatic Dicing Saw

Offering improved productivity of fully automatic dual spindle dicing saws by introducing measures to increase throughput with proven records in the field

Φ200 mm
Facing dual spindle

Increased productivity

DFD6341 is the latest fully automatic dual spindle dicing saw for Φ8-inch wafers, incorporating the throughput enhancement technology developed in DFD6362 for Φ300 mm wafers. Adoption of a uniquely developed axis mechanism enables X-axis return speeds up to 1,000 mm/s. Improved acceleration and deceleration performance for each axis also increases the distance where the axis moves at maximum speed, substantially improving throughput. In addition, optimization of the parts used increases the speed of the major transfer unit and a shorter distance between the spindles allows for less processing time during dual cut.

Space - saving design

The footprint is reduced by 3% from the DFD6340. Four different accessories: the transformer, UPS (uninterruptible power supply), CO2 injector, and booster pressure pump can be included internally without expanding the footprint.

Easy operation

A GUI (graphical user interface) which has been recognized as easy to use on existing models has been included on the DFD6341.Combined with an LCD touch panel, the DFD6341 offers stress-free operation for operators

High speed flash alignment (optional)

High speed flash alignment combines a xenon flash lamp and a high speed CCD shutter for high speed. Combines a xenon flash lamp and a high-speed CCD shutter to perform high speed alignment without the need to stop the chuck table, which reduces alignment time and increases throughput.

DFD6341 Operation flow

Lower arm moves workpiece from the cassette to the pre-alignment stage. Lower arm moves the workpiece to the chuck table → cutting →
Upper arm moves the workpiece to the spinner table → cleaning & drying →
Lower arm returns the workpiece to the cassette

Specifications

Specification		Unit	1.2、1.8 kW、High speed rotation	2.2 kW
Max. workpiece size		-	Φ8 inch
X-axis	Cutting range	mm	210
X-axis	Cutting speed	mm/s	0.1 ～ 1,000
Y1･Y2-axis	Cutting range	mm	210
	Index step	mm	0.0001
	Positioning accuracy	mm	Within 0.002/210 (Single error) Within 0.002/5
Z-axis	Max. stroke	mm	19.22 (For Φ2 inch blade)	19.9（For Φ3 inch blade）
	Moving resolution	mm	0.00005
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	380
Spindle	Rated torque	N・m	0.19（1.2 kW/High speed rotation） 0.29（1.8 kW）	0.7
Spindle	Rotation speed range	min^‐1	6,000 ～ 60,000（1.2 kW/1.8 kW） 20,000 ～ 80,000（High speed rotation）	3,000 ～ 30,000
Equipment dimensions(W×D×H)		mm	1,180 × 1,080 × 1,820
Equipment weight		kg	Approx. 1,500

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DFD6240	DFD6340	DFD6342	DFD6361	DFD6362	DFD6363	DFD6450	DFD6560	DFD6561	DFD6750	DFD6760
Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic
1	2	2	2	2	2	2	2	2	2	2
1	1	1	1	1	1	1	1	1	2	2
900 × 1,190 × 1,800	1,180 × 1,110 × 1,850	1,180 × 1,080 × 1,820	1,200 × 1,550 × 1,800	1,200 × 1,550 × 1,800	1,200 × 1,550 × 1,800	1,120 × 1,500 × 1,600	1,240 × 1,550 × 1,960	1,240 × 1,550 × 1,800	1,510 × 1,554 × 1,800	1,200 × 1,900 × 1,800
1,200	1,600	1,240	2,050	2,050	1,800	1,400	1,640	1,500	2,200	2,800