DFD6362Fully Automatic Dicing Saw

Dicing saw for improved productivity with Φ300 mm wafers

Φ300 mm
Facing dual spindle

Realizes further productivity improvement with various new functions

DFD6362 offers higher dual cut processing speed due to the shortened distance between the spindles. Enhanced axis mechanism improves the X-axis return speed and optimization of the parts used achieves higher speeds for the major transfer unit, resulting in a throughput improvement of approx. 7% compared to the previous model under the same conditions.

Improves full cleaning capabilities

DFD6362 uses a wheel cover effective against particle adhesion based on water flow analysis in the vicinity of the processing section. In addition, a chuck table water curtain (CTWC) and atomizing nozzle for wheel cover can be selected as an option to suit specific workpieces.

Automatic Blade Changer (ABC) ^※

Fully automates the blade replacement and precut procedures after blade breakage and at the end of blade life and restarts processing, thus reducing operator workload. Since it takes sixty seconds to replace a blade, the ABC leads to substantially shorter downtime. The equipment scans the 2D barcode on the backside of the blade containing information on the blade type, preventing potential human errors during blade replacement.

※ optional function

Advanced graphical operation software

Realizes an improvement in operability by setting operation buttons on the same screen as the microscope picture, especially when performing operations such as the teach operation. Also, the software is able to display the equipment operation conditions in a clearer and more understandable way by graphically representing the equipment conditions.

DFD6362 Operation flow

Lower arm moves the workpiece from the cassette to the pre-alignment stage. Lower arm moves the workpiece to the chuck table → cutting →
Upper arm moves the workpiece to the spinner table → cleaning & drying →
Lower arm returns the workpiece to the cassette

Specifications

Specification		Unit	1.2, 1.8 kW, High-speed rotation	2.2 kW
Max. workpiece size		mm	Φ300
X-axis	Cutting range	mm	310
X-axis	Cutting speed	mm/s	0.1 ～ 1,000
Y1･Y2-axis	Cutting range	mm	310
	Index step	mm	0.0001
	Positioning accuracy	mm	Within 0.002/310 (Single error) Within 0.002/5
Z-axis	Max. stroke	mm	14.7 (For Φ2 inch blade)	14.9 (For Φ3 inch blade)
	Moving resolution	mm	0.00005
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	380
Spindle	Rated torque	N・m	0.19（1.2 kW/High-speed rotation） 0.29（1.8 kW）	0.7
Spindle	Rotation speed range	min^‐1	6,000 ～ 60,000（1.2 kW/1.8 kW） 20,000 ～ 80,000(High-speed rotation)	3,000 ～ 30,000
Equipment dimensions(W×D×H)		mm	1,200 × 1,550 × 1,800
Equipment weight		kg	Approx. 2,050

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DFD6240	DFD6340	DFD6341	DFD6342	DFD6361	DFD6363	DFD6450	DFD6560	DFD6561	DFD6750	DFD6760
Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic
1	2	2	2	2	2	2	2	2	2	2
1	1	1	1	1	1	1	1	1	2	2
900 × 1,190 × 1,800	1,180 × 1,110 × 1,850	1,180 × 1,080 × 1,820	1,180 × 1,080 × 1,820	1,200 × 1,550 × 1,800	1,200 × 1,550 × 1,800	1,120 × 1,500 × 1,600	1,240 × 1,550 × 1,960	1,240 × 1,550 × 1,800	1,510 × 1,554 × 1,800	1,200 × 1,900 × 1,800
1,200	1,600	1,500	1,240	2,050	1,800	1,400	1,640	1,500	2,200	2,800