DFD6561Fully Automatic Dicing Saw

A space-saving solution for Φ300 mm dicing

Φ300 mm
Facing dual spindle

Space-saving layout

DFD6561 is equipped with uniquely developed short spindles and an optimized bridge-type frame structure resulting in a 16% reduced footprint. All maintenance can be performed from the front of the equipment, thus reducing the area needed for installation and maintenance areas by 20% (compared to the DFD6362). The DFD6561 is particularly ideal when installing multiple adjacent units.

Intuitive operation for operator ease

The LCD panel allows touch operation of the alignment teach function. Important data, such as the equipment condition and mean time between assists (MTBA) is also displayed on screen, allowing the operator to easily confirm the status of the equipment. Onscreen error recovery assistance is also available.

High-rigidity spindle

Adoption of high rigidity spindle achieves increased processing stability.

Non-contact setup

The NCS (Non-Contact Setup) measures the blade wear amount with high accuracy and speed.

Synchronized dicing axis (X, Y, and Z) control

Measures the height of the chuck table to which the wafer will be secured in advance and controls the blade cutting depth with high accuracy (user-specified).

Options for particle prevention

Users can select optional particle prevention measures used in other models, such as the cut section atomizing nozzle and spinner atomizing nozzle. A chuck table water curtain, which prevents particle adhesion caused by wafer drying, is also available.

Concentrated maintenance area

All operations, from routine to maintenance, can be performed from the front of the equipment. The space reduction achieved in the DFD6561 allows 5 units to be lined up in a space which would only fit 4 units for the DFD6362 at a production facility.

DFD6561 operation flow

Push-pull arm moves the workpiece from the cassette to the pre-alignment stage →
After centering at the pre-alignment stage, the lower arm moves the workpiece to the chuck table →
Cutting →
Upper arm moves the workpiece to the spinner table →
Cleaning and drying → Lower arm moves the workpiece to the pre-alignment stage →
Push-pull arm returns the workpiece to the cassette.

Specifications

Specification		Unit	1.8 kW	High-speed rotation (option)
Max. workpiece size		mm	Φ300
X-axis	Cutting range	mm	310
X-axis	Cutting speed	mm/s	0.1 ～ 1,000
Y1･Y2-axis	Cutting range	mm	310
	Index step	mm	0.0001
	Positioning accuracy	mm	Within 0.002/310 (Single error) Within 0.002/5
Z-axis	Max. stroke	mm	14.2 (For Φ2 inch blade)
	Moving resolution	mm	0.0000002
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	380
Spindle	Rated torque	N・m	0.29	0.19
Spindle	Rotation speed range	min^‐1	6,000 ～ 60,000	20,000 ～ 80,000
Equipment dimensions(W×D×H)		mm	1,240 × 1,550 × 1,800	81mm convex （left side）
Equipment weight		kg	Approx. 1,500

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DFD6240	DFD6340	DFD6341	DFD6342	DFD6361	DFD6362	DFD6363	DFD6450	DFD6560	DFD6750	DFD6760
Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic
1	2	2	2	2	2	2	2	2	2	2
1	1	1	1	1	1	1	1	1	2	2
900 × 1,190 × 1,800	1,180 × 1,110 × 1,850	1,180 × 1,080 × 1,820	1,180 × 1,080 × 1,820	1,200 × 1,550 × 1,800	1,200 × 1,550 × 1,800	1,200 × 1,550 × 1,800	1,120 × 1,500 × 1,600	1,240 × 1,550 × 1,960	1,510 × 1,554 × 1,800	1,200 × 1,900 × 1,800
1,200	1,600	1,500	1,240	2,050	2,050	1,800	1,400	1,640	2,200	2,800