DFD6561 is equipped with uniquely developed short spindles and an optimized bridge-type frame structure resulting in a 16% reduced footprint. All maintenance can be performed from the front of the equipment, thus reducing the area needed for installation and maintenance areas by 20% (compared to the DFD6362). The DFD6561 is particularly ideal when installing multiple adjacent units.
The LCD panel allows touch operation of the alignment teach function. Important data, such as the equipment condition and mean time between assists (MTBA) is also displayed on screen, allowing the operator to easily confirm the status of the equipment. Onscreen error recovery assistance is also available.
Adoption of high rigidity spindle achieves increased processing stability.
The NCS (Non-Contact Setup) measures the blade wear amount with high accuracy and speed.
Measures the height of the chuck table to which the wafer will be secured in advance and controls the blade cutting depth with high accuracy (user-specified).
Users can select optional particle prevention measures used in other models, such as the cut section atomizing nozzle and spinner atomizing nozzle. A chuck table water curtain, which prevents particle adhesion caused by wafer drying, is also available.
All operations, from routine to maintenance, can be performed from the front of the equipment. The space reduction achieved in the DFD6561 allows 5 units to be lined up in a space which would only fit 4 units for the DFD6362 at a production facility.
|Specification||Unit||1.8 kW||High speed (option)|
|Max. workpiece size||mm||Φ300|
|Cutting speed||mm/s||0.1 ～ 1,000|
|Positioning accuracy||mm||Within 0.002/310
(Single error) Within 0.002/5
|Z-axis||Max. stroke||mm||14.2 (For Φ2 inch blade)|
|θ-axis||Max. rotating angle||deg||380|
|Revolution speed range||min‐1||6,000 ～ 60,000||20,000 ～ 80,000|
|Machine dimensions(W×D×H)||mm||1,240 × 1,550 × 1,960||81mm convex （left side）|
|Machine weight||kg||Approx. 1,500|
*Product appearance, features, specifications, and other details may change due to technical
*Please read the standard specification sheet thoroughly before use.
|Machine dimentions（W × D × H）|
|Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic|
|900 × 1,190 × 1,800||1,180 × 1,110 × 1,850||1,180 × 1,080 × 1,820||1,200 × 1,550 × 1,800||1,200 × 1,550 × 1,800||1,200 × 1,550 × 1,800||1,120 × 1,500 × 1,600||1,240 × 1,550 × 1,960||1,510 × 1,554 × 1,800||1,200 × 1,900 × 1,800|