DFD6363Fully Automatic Dicing Saw

Flagship model for Φ300 mm wafers with high process extensibility

Φ300 mm
Facing dual spindle
DBG

Compatible with both frame and two-way^*(frame/wafer) transferring

Various processes, including full cut and half cut, can be supported with only one DFD6363. Size conversion operations can be reduced, reducing human error. Supports both standard cassettes (Φ200 mm / Φ300 mm) and FOUP cassettes.

*Option

Automatic Blade Changer (ABC)^*

This feature minimizes equipment downtime by automatically detecting the end of blade life and performing all operations from blade replacement to continuing processing in fully automatic operation. It also prevents potential human errors during blade replacement due to workpiece changes and is effective for improved traceability.

*Option

Basic function improvements

DFD6363 offers improved usability through the adoption of a 19-inch monitor and highly visible GUI (Graphical User Interface). It also achieves reduced processing time by optimizing the axis operation through multiple-axis synchronous control. Can expect improved productivity with the improved NCS (Non-Contact Setup)^* and stable processing with the mounted specially developed 1.8 kW spindle (60,000 min^-1)

*Option

Operation flow

(For frame transfer spec.)

The lower arm retrieves the workpiece from the cassette. Centering is performed at the pre-alignment stage. The lower arm moves the workpiece to the chuck table. → Cutting →
The upper arm moves the workpiece to the spinner table. → Cleaning and drying →
The lower arm returns the workpiece to the cassette.

Specifications

Specification		Unit	1.8 kW, High-speed rotation	2.2 kW
Max. workpiece size		mm	Φ300
X-axis	Cutting range	mm	310
X-axis	Cutting speed	mm/s	0.1 ～ 1,000
Y1･Y2-axis	Cutting range	mm	310
	Index step	mm	0.0001
	Positioning accuracy	mm	Within 0.002/310 (Single error) Within 0.002/5
Z-axis	Max. stroke	mm	14.7 (For Φ2 inch blade)	14.9 (For Φ3 inch blade)
	Moving resolution	mm	0.0000002
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	380
Spindle	Rated torque	N・m	0.29(1.8 kW) 0.19(High-speed rotation)	0.7
Spindle	Rotation speed range	min^‐1	6,000 ～ 60,000（1.8 kW） 20,000 ～ 80,000(High-speed rotation)	3,000 ～ 30,000
Equipment dimensions(W×D×H)		mm	1,200 × 1,550 × 1,800
Equipment weight		kg	Approx. 1,800

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DFD6240	DFD6340	DFD6341	DFD6342	DFD6361	DFD6362	DFD6450	DFD6560	DFD6561	DFD6750	DFD6760
Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic	Fully Automatic
1	2	2	2	2	2	2	2	2	2	2
1	1	1	1	1	1	1	1	1	2	2
900 × 1,190 × 1,800	1,180 × 1,110 × 1,850	1,180 × 1,080 × 1,820	1,180 × 1,080 × 1,820	1,200 × 1,550 × 1,800	1,200 × 1,550 × 1,800	1,120 × 1,500 × 1,600	1,240 × 1,550 × 1,960	1,240 × 1,550 × 1,800	1,510 × 1,554 × 1,800	1,200 × 1,900 × 1,800
1,200	1,600	1,500	1,240	2,050	2,050	1,400	1,640	1,500	2,200	2,800