DAD3431Automatic Dicing Saw

Adopted an air slide on the X-axis to support high precision processing needs

Φ150 mm
Single spindle

Able to support wide range of applications

Supports workpieces up to Φ6-inch or 150 X 150 mm with user-specified specification. In addition, the standard 2.0 kW high torque spindle enables processing of difficult-to-process materials.
The structure includes a wide water case for a longer X-axis stroke.

Able to support high precision / high quality processing

X-axis adopts a structure that makes use of the air slider characteristics to achieve improved straightness.
In addition, a linear scale mounted on the Y-axis as standard enables stable axis control and higher positioning accuracy. This supports fine processing needs which require high accuracy, including optical parts and magnetic head cutting and grooving.

Improved throughput

High Z-axis feed speed

Improved functions and operation

The high-speed, high-accuracy NCS (Non-Contact Setup, optional) reduces blade height measurement time for the processing table by 74%. Further processing quality stabilization is achieved through improved measurement accuracy. In addition, the visibility during kerf check was improved by enabling microscope ring light three-channel switching. This model supports SECS/GEM.

Ring light three-channel switching specification

Easy operation

XIS (Extended Interface System)
Operation buttons consolidated on microscope screens
Wafer mapping
Graphic processing condition display similar to full automation equipment.
Log viewer
Graphic analog data display and equipment data visualization
Help viewer
Displays instructions when error occurs for quick, accurate recovery.

High maintainability

Installation of microscope lens shutter and scope blow function reduces maintenance frequency while improving equipment operation ratio.

Specifications

Specification		Unit
Max. workpiece size		-	Φ6 inch (150 mm × 150 mm, 220 mm × 160 mm user-specified specification)
X-axis	Cutting range	mm	160
X-axis	Cutting speed	mm/s	0.1 ～ 300
Y-axis	Cutting range	mm	162
	Index step	mm	0.0001
	Index positioning accuracy	mm	0.0015/160 (Single error) 0.0005/5
Z-axis	Max. stroke	mm	32.2（Φ2" blade）
	Moving resolution	mm	0.000002 (2 nm)
	Repeatability accuracy	mm	0.001
θ-axis	Max. rotating angle	deg	320
Spindle	Rated output	kW	2.0 at 40,000 min^-1
	Rated torque	N・m	0.48
	Rotation speed range	min^‐1	3,000 ～ 40,000
Equipment dimensions(W×D×H)		mm	730 × 900 × 1,670
Equipment weight		kg	Approx. 600

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

Product Lineup



Machine type
Spindle
C/T
Machine dimentions（W × D × H）
Machine weight（kg）


DAD324	DAD3221	DAD3231	DAD3241	DAD3350	DAD3351	DAD3361	DAD3651	DAD3660	DAD3661
Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic	Automatic
1	1	1	1	1	1	1	2	2	2
1	1	1	1	1	1	1	1	1	1
490 × 870 × 1,670	490 × 870 × 1,670	650 × 950 × 1,670	650 × 950 × 1,670	900 × 1,050 × 1,800	880 × 1000 × 1,800	880 × 1,000 × 1,800	790 × 790 × 1,800	1,350 × 1,200 × 1,890	1,350 × 1,200 × 1,800
420	420	550	550	1,200	1,100	1,100	1,040	1,500	1,550